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摘要
微纳电离式气体传感器基于微尺度放电原理, 具有响应快、精度高、易集成等特点, 有望实现对气体的快速准确检测. 目前缺少对该新型传感器极间放电过程的系统分析. 对此本文采用流体-化学动力学混合方法, 建立了常温常压下大气中N2-O2混合气体在微米间隙-纳米尖端场域的二维空间放电模型, 并通过分析空间电子输运机制、放电电流密度、空间电场强度之间的相互耦合关系, 阐明了该场域下空间放电的动态发展过程, 完善了微纳电离式气体传感器内部放电机理, 且分析了不同极间距对空间放电的影响规律. 结果表明: 该场域下空间电场随正负离子的产生与消耗达到动态平衡而保持恒定, 使空间放电得以维持, 放电电流密度趋于稳定; 且随着极间距的减小放电电流密度呈现出先增大后减小的趋势, 此特性为传感器的优化提供了一定的理论指导.-
关键词:
- 电离式气体传感器 /
- 放电过程 /
- 空间电场 /
- 电流密度
Abstract
Based on the principle of micro-scale discharge, the micro-nano ionization gas sensor has the characteristics of fast response, high precision and easy integration. It is expected to achieve rapid and accurate detection of gas. At present, there is a lack of systematic analysis of the inter-polar discharge process of the new sensor. This paper uses the fluid-chemical dynamics methodology to create a 2D space discharge model of the N2-O2 mixed gas at the micron gap and the nano-tip field in ambient atmosphere at normal temperature and pressure. Meanwhile, by analyzing the mutual coupling between the space electron transport process, the discharge current density, and the space electric field strength, the paper clarifies the dynamics of space discharge in the field, improves how internal discharges work in such micro-nano structured ionization gas sensors, and analyzes the pattern of influence of different polar distances on space discharges. The results show that the electric field in the space remains constant as the production and consumption of positive and negative ions reaches a dynamic equilibrium in the field. It is reflected in the field strengthening effect of positive ion groups to the cathode plate and of negative ion groups to the anode plate, as well as in the field weakening effect between positive and negative ion groups. The resulting stable and strong electric field of the cathode makes sure that space discharge is maintained, and the discharge current density stabilizes. Initially, as the polar distance decreases gradually, the electric field strength between the poles and plates increases. It plays a leading role in the accumulation of electron energy and in the increase in the number density of electrons, thus leading to the increase of the output current density up to the peak value when the polar distance D = 50 μm. As the polar distance decreases, the field strength between the poles and plates increases. Despite that, when electrons accumulate energy up to such a level that gas molecules can be ionized, the necessary movement distance and the distance required to increase the number density of electrons decreases. As a result, the degree of ionization weakens, and the field strengthening effect of positive ions decreases. In other words, the increment of the field strength caused by positive ions at the tip decreases, and in turn, the discharge current density decreases. This pattern serves as a theoretical support in the optimization of the micro-nano structured ionization gas sensors.-
Keywords:
- ionization gas sensor /
- discharge process /
- space electric field /
- current density
作者及机构信息
Authors and contacts
文章全文 : translate this paragraph
参考文献
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施引文献
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图 1 放电原理图
Fig. 1. Discharge schematic diagram.
图 2 不同时刻的电子密度分布图 (a) t1 = 0.1 ns; (b) t2 = 0.3 ns; (c) t3 = 1 ns; (d) t4 = 100 ns; (e) t5 = 150 ns; (f) t6 = 200 ns
Fig. 2. Electron density maps at different times: (a) t1 = 0.1 ns; (b) t2 = 0.3 ns; (c) t3 = 1 ns; (d) t4 = 100 ns; (e) t5 = 150 ns; (f) t6 = 200 ns.
图 3 中轴线上不同位置处电场强度随时间的变化曲线
Fig. 3. Curves of electric field strength with time at different positions on the central axis.
图 4 负极板上外加电压随时间的变化曲线
Fig. 4. Time-varying curve of applied voltage on the negative plate.
图 5 不同时刻正负离子密度轴向分布 (a) t1 = 100 ns; (b) t2 = 140 ns; (c) t3 = 150 ns; (d) t4 = 200 ns
Fig. 5. Axial distributions of positive and negative ion density at different times: (a) t1 = 100 ns; (b) t2 = 140 ns; (c) t3 = 150 ns; (d) t4 = 200 ns
图 6 放电电流密度随时间的变化曲线
Fig. 6. Curve of discharge current density with time.
图 7 尖端处的电场强度随时间的变化曲线
Fig. 7. Curve of the electric field strength at the tip with time.
图 8 不同极间距下的放电电流密度 (a) 所有时间; (b) 稳定时刻
Fig. 8. The intensity of the electric field at the different poles: (a) All the time; (b) stable time.
图 9 不同极间距下尖端处电场强度随时间的变化曲线
Fig. 9. Variation curve of electric field strength with time at the tip under different pole spacing.
图 10 不同极间距下尖端处的场强增量
Fig. 10. The increment of field strength at the tips of different pole spaces.
表 1 N2-O2等离子体化学反应
Table 1. N2-O2 plasma chemical reactions.
类型 序号 反应式 反应速率 参考文献 电子碰撞反应 R1 ${\rm{e}} + {{\rm{N}}_{\rm{2}}} \to {\rm{e}} +{\rm{ e}} +{\rm{ N}}_{\rm{2}}^{{ + }} $ f (ε) [ 29] R2 ${\rm{e}} + {{\rm{O}}_2} \to {\rm{e}} + {\rm{e}} + {\rm{O}}_2^ + $ f (ε) [ 29] R3 ${\rm{e}} + {\rm{O}}_4^ + \to 2{{\rm{O}}_2}$ 1.4 × 10–42(300/Te)0.5 mol·s–1 [ 29] R4 ${\rm{e}} + {\rm{O}}_2^ + \to 2{\rm{O}}$ 2.0 × 10–13(300/Te) mol·s–1 [ 29] R5 ${\rm{e}} + 2{{\rm{O}}_2} \to {{\rm{O}}_2} + {\rm{O}}_2^ - $ 2.0 × 10–41(300/Te) mol·s–1·m–6 [ 29] 重粒子反应 R6 ${\rm{O}}_{\rm{2}}^{{ + }}{{ + }}{{\rm{O}}_{\rm{2}}}{{ + }}{{\rm{N}}_{\rm{2}}} \to {\rm{O}}_{\rm{4}}^{{ + }}{{ + }}{{\rm{N}}_2}$ 2.4 × 10–42 mol·s–1·m–6 [ 29] R7 ${{\rm{N}}_{\rm{2}}}{\rm{O}}_{\rm{2}}^{{ + }}{{ + }}{{\rm{O}}_{\rm{2}}} \to {\rm{O}}_{\rm{4}}^{{ + }}{{ + }}{{\rm{N}}_2}$ 1.0 × 10–15 mol·s–1·m–3 [ 29] R8 ${{\rm{N}}_{\rm{2}}}{\rm{O}}_{\rm{2}}^{{ + }}{{ + }}{{\rm{N}}_{\rm{2}}} \to {\rm{O}}_2^{{ + }}{{ + 2}}{{\rm{N}}_{\rm{2}}}$ 4.3 × 10–10 mol·s–1·m–3 [ 29] R9 ${\rm{O}}_{\rm{2}}^{{ + }}{{ + 2}}{{\rm{N}}_{\rm{2}}} \to {{\rm{N}}_{\rm{2}}}{\rm{O}}_{\rm{2}}^{{ + }}{{ + }}{{\rm{N}}_{\rm{2}}}$ 9.0 × 10–43 mol·s–1·m–6 [ 29] R10 ${{\rm{O}}_{\rm{2}}} +{\rm{ N}}_{\rm{2}}^{{ + }} \to {{\rm{N}}_{\rm{2}}} +{\rm{ O}}_{\rm{2}}^{{ + }}$ 6.0 × 10–17 mol·s–1·m–3 [ 29] R11 ${\rm{N}}_{\rm{2}}^{{ + }}{{ + }}{{\rm{N}}_{\rm{2}}}{{ + }}{{\rm{O}}_{\rm{2}}} \to {{\rm{O}}_{\rm{2}}} + {\rm{N}}_{\rm{4}}^{{ + }}$ 5.0 × 10–41 mol·s–1·m–6 [ 29] R12 ${{\rm{O}}_{\rm{2}}}+ {\rm{ N}}_{\rm{4}}^{{ + }} \to {\rm{2}}{{\rm{N}}_{\rm{2}}}+ {\rm{ O}}_{\rm{2}}^{{ + }}$ 2.5 × 10–16 mol·s–1·m–3 [ 29] R13 ${\rm{2}}{{\rm{N}}_{\rm{2}}}+ {\rm{ N}}_{\rm{2}}^{{ + }} \to {{\rm{N}}_{\rm{2}}}+ {\rm{ N}}_{\rm{4}}^{{ + }}$ 5.0 × 10–41 mol·s–1·m–6 [ 29] R14 ${\rm{O}}_{\rm{2}}^{{ + }}+ {\rm{ 2}}{{\rm{O}}_{\rm{2}}} \to {\rm{O}}_{\rm{4}}^{{ + }}{{ + }}{{\rm{O}}_{\rm{2}}}$ 2.4 × 10–42 mol·s–1·m–6 [ 29] R15 ${\rm{O}}_{\rm{4}}^{{ + }}+ {\rm{ O}}_{\rm{2}}^ - \to {\rm{3}}{{\rm{O}}_{\rm{2}}}$ 1.0 × 10–13 mol·s–1·m–3 [ 29] R16 ${\rm{O}}_{\rm{4}}^{{ + }}+ {\rm{ O}}_{\rm{2}}^ - {{ + }}{{\rm{N}}_2} \to {\rm{3}}{{\rm{O}}_{\rm{2}}} + {{\rm{N}}_{\rm{2}}}$ 2.0 × 10–17 mol·s–1·m–6 [ 29] R17 ${\rm{O}}_{\rm{4}}^{{ + }}+ {\rm{ O}}_{\rm{2}}^ - {{ + }}{{\rm{O}}_{\rm{2}}} \to {\rm{3}}{{\rm{O}}_{\rm{2}}}{{ + }}{{\rm{O}}_{\rm{2}}}$ 2.0 × 10–17 mol·s–1·m–6 [ 29] R18 ${\rm{O}}_{\rm{2}}^{{ + }}+ {\rm{ O}}_{\rm{2}}^ - {{ + }}{{\rm{O}}_{\rm{2}}} \to {\rm{2}}{{\rm{O}}_{\rm{2}}}{{ + }}{{\rm{O}}_{\rm{2}}}$2 2.0 × 10–17 mol·s–1·m–6 [ 29] R19 ${\rm{O}}_{\rm{2}}^{{ + }}+ {\rm{ O}}_{\rm{2}}^ - {{ + }}{{\rm{N}}_{\rm{2}}} \to {\rm{2}}{{\rm{O}}_{\rm{2}}}{{ + }}{{\rm{N}}_{\rm{2}}}$ 2.0 × 10–17 mol·s–1·m–6 [ 29] 表 2 表面反应
Table 2. Surface reactions.
序号 反应式 针电极(阴极) 板电极(阳极) γ εi/eV γ εi/eV R20 ${\rm{e}} + {\rm{N}}_{\rm{2}}^{{ + }} \to {{\rm{N}}_{\rm{2}}}$ 0.05 4 0 0 R21 ${\rm{e }}+{{\rm{N}}_{\rm{2}}}{\rm{O}}_{\rm{2}}^{{ + }} \to {{\rm{N}}_{\rm{2}}}{{ + }}{{\rm{O}}_{\rm{2}}}$ 0.05 4 0 0 R22 ${\rm{e}} + {\rm{N}}_{\rm{4}}^{{ + }} \to {\rm{2}}{{\rm{N}}_{\rm{2}}}$ 0.05 4 0 0 R23 ${\rm{e}} + {\rm{O}}_{\rm{2}}^{{ + }} \to {{\rm{O}}_{\rm{2}}}$ 0.05 4 0 0 R24 ${\rm{e}} +{\rm{ O}}_{\rm{4}}^{{ + }} \to 2{{\rm{O}}_{\rm{2}}}$ 0.05 4 0 0 R25 ${\rm{e}} +{\rm{ O}}_{\rm{2}}^{{ - }} \to {{\rm{O}}_{\rm{2}}}$ 0 0 0 0 深圳SEO优化公司坑梓网站优化推广公司邯郸关键词排名包年推广多少钱普洱网站设计模板报价宝安百度关键词包年推广多少钱营口百度标王推荐朔州网站推广方案哪家好大连设计公司网站推荐济宁百搜标王公司安顺百度竞价报价伊犁网站设计价格黄山百度关键词包年推广推荐临汾百度标王价格鹤壁网站seo优化多少钱来宾网站开发报价罗湖建设网站报价张北网站排名优化报价湘西网站制作设计哪家好邵阳网站优化公司清徐网站搭建推荐聊城优化价格汕头外贸网站设计报价梅州网站改版哪家好绍兴SEO按天扣费哪家好新余网页设计推荐菏泽网站建设哪家好哈尔滨模板推广多少钱德阳百度标王公司湘西百度网站优化西安网站优化按天扣费价格南阳百度seo歼20紧急升空逼退外机英媒称团队夜以继日筹划王妃复出草木蔓发 春山在望成都发生巨响 当地回应60岁老人炒菠菜未焯水致肾病恶化男子涉嫌走私被判11年却一天牢没坐劳斯莱斯右转逼停直行车网传落水者说“没让你救”系谣言广东通报13岁男孩性侵女童不予立案贵州小伙回应在美国卖三蹦子火了淀粉肠小王子日销售额涨超10倍有个姐真把千机伞做出来了近3万元金手镯仅含足金十克呼北高速交通事故已致14人死亡杨洋拄拐现身医院国产伟哥去年销售近13亿男子给前妻转账 现任妻子起诉要回新基金只募集到26元还是员工自购男孩疑遭霸凌 家长讨说法被踢出群充个话费竟沦为间接洗钱工具新的一天从800个哈欠开始单亲妈妈陷入热恋 14岁儿子报警#春分立蛋大挑战#中国投资客涌入日本东京买房两大学生合买彩票中奖一人不认账新加坡主帅:唯一目标击败中国队月嫂回应掌掴婴儿是在赶虫子19岁小伙救下5人后溺亡 多方发声清明节放假3天调休1天张家界的山上“长”满了韩国人?开封王婆为何火了主播靠辱骂母亲走红被批捕封号代拍被何赛飞拿着魔杖追着打阿根廷将发行1万与2万面值的纸币库克现身上海为江西彩礼“减负”的“试婚人”因自嘲式简历走红的教授更新简介殡仪馆花卉高于市场价3倍还重复用网友称在豆瓣酱里吃出老鼠头315晚会后胖东来又人满为患了网友建议重庆地铁不准乘客携带菜筐特朗普谈“凯特王妃P图照”罗斯否认插足凯特王妃婚姻青海通报栏杆断裂小学生跌落住进ICU恒大被罚41.75亿到底怎么缴湖南一县政协主席疑涉刑案被控制茶百道就改标签日期致歉王树国3次鞠躬告别西交大师生张立群任西安交通大学校长杨倩无缘巴黎奥运
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[1] 谢云龙, 钟国, 杜高辉 2012 化学学报 70 1221 Google Scholar
Xie Y L, Zhong G, Du G H 2012 Acta Chim. Sinica 70 1221 Google Scholar
[2] 常进, 张为军, 刘卓峰, 陈兴宇 2016 电子元件与材料 35 15 Google Scholar
Chang J, Zhang W J, Liu Z F, Chen X Y 2016 Electr. Comp. Mater. 35 15 Google Scholar
[3] Ashish M, Nikhil K, Eric L, Wei B Q, Pulickel M A 2003 Nature 424 171 Google Scholar
[4] 刘凯, 邹德福, 廉五州, 马丽铃, 马丽敏, 陈志东 2016 仪表技术与传感器 1 10 Google Scholar
Liu K, Zou D F, Lian W Z, Ma L L, Ma L M, Chen Z D 2016 Instr. Techn. Sensor 1 10 Google Scholar
[5] 张一茗, 袁欢, 穆广祺, 宋亚凯, 张文涛, 王小华 2016 高压电器 52 134 Google Scholar
Zhang Y M, Yuan H, Mu G Q, Song Y K, Zhang W T, Wang X H 2016 High Volt. Appar. 52 134 Google Scholar
[6] Trichel G W 1938 Phys. Rev. 54 1078 Google Scholar
[7] 廖瑞金, 刘康淋, 伍飞飞, 杨丽君, 周之 2014 高电压技术 40 965 Google Scholar
Liao R J, Liu K L, Wu F F, Yang L J, Zhou Z 2014 High Volt. Eng. 40 965 Google Scholar
[8] 郑殿春, 夏云双, 赵大伟, 陈春天, 王佳 2013 电机与控制学报 17 75 Google Scholar
Zheng D C, Xia Y S, Zhao D W, Chen C T, Wang J 2013 Electr. Mach. Contrl. 17 75 Google Scholar
[9] Zhang J Y, Zhang Y, Pan Z G, Yang S, Shi J H, Li S T, Min D M, Li X, Wang X H, Liu D X, Yang A J 2015 Appl. Phys. Lett. 107 093104 Google Scholar
[10] Zhang Y, Li S T, Zhang J Y, Pan Z G, Min D M, Li Xin, Song X P, Liu J H 2013 Sci. Rep. 3 1267 Google Scholar
[11] 柴钰, 弓丽萍, 张晶园, 赵永秀 2019 电工技术学报 34 4870 Google Scholar
Chai Y, Gong L P, Zhang J Y, Zhao Y X 2019 Trans. Chin. Electrotechnical Soc. 34 4870 Google Scholar
[12] Yang H S, Tan Z M, Liu Y, Ma Z X, Zhang L 2013 IEEE T. Nanotechnol. 12 1037 Google Scholar
[13] Nebol’sin V A, Spiridonov B A, Dunaev A I, Bogdanovich E V 2016 Inorg. Mater. 53 595 Google Scholar
[14] 程永红, 孟国栋, 董承业 2017 电工技术学报 32 13 Google Scholar
Cheng Y H, Meng G D, Dong C Y 2017 Trans. Chin. Electrotechnical Soc. 32 13 Google Scholar
[15] 孔迪, 李建周, 张昊, 陈昶 2014 电子设计工程 22 127 Google Scholar
Kong D, Li J Z, Zhang H, Chei C 2014 Int. Electr. Elem. 22 127 Google Scholar
[16] 廖瑞金, 伍飞飞, 刘兴华, 杨帆, 杨丽君, 周之, 翟蕾 2012 物理学报 61 245201 Google Scholar
Liao R J, Wu F F, Liu X H, Yang F, Yang L J, Zhou Z, Zhai L 2012 Acta Phys. Sin. 61 245201 Google Scholar
[17] 周雪会, 陈登义, 陈则煌 2016 陶瓷避雷器 5 152 Google Scholar
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目录
- 第69卷,第16期 - 2020年08月20日
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