飞秒激光加工微纳光学器件

董彬; 张娟; 王达伟; 张亦元; 张乐然; 李瑞; 辛晨; 刘顺利; 张子航; 吴昊; 蒋绍军; 朱苏皖; 刘炳瑞; 吴东

doi:10.12086/oee.2023.220073

飞秒激光加工微纳光学器件

董彬^1,,
张娟²,
王达伟¹,
张亦元¹,
张乐然¹,
李瑞¹,
辛晨¹,
刘顺利¹,
张子航¹,
吴昊¹,
蒋绍军¹,
朱苏皖¹,
刘炳瑞^{1, ,},
吴东^{1, ,}

- 1.
  中国科学技术大学精密机械与精密仪器系，中国科学院材料力学行为与设计重点实验室，安徽省高等学校精密科学仪器重点实验室，安徽合肥 230026
- 2.
  中国科学技术大学第一附属医院，生命科学与医学部，安徽合肥 230001
基金项目:
国家自然科学基金资助项目(61927814, 52122511, 91963127, 52075516, U20A20290, 52175396)；安徽省重大科技专项(201903a05020005)

详细信息

作者简介:
董彬(1997-)，男，硕士，主要从事飞秒激光微纳加工光学微结构。E-mail: snowmail@mail.ustc.edu.cn;

刘炳瑞(1989-)，男，博士，2017年获得中国科学技术大学博士学位，主要研究方向为微纳米技术、激光加工和增材制造。E-mail: brliu@ustc.edu.cn;

吴东(1983-)，男，博士，教授，主要从事利用超快激光与材料的非线性作用和计算机控制扫描实现多种材料的高精度三维加工和复杂造型，并提出了若干加工新原理和关键技术，将其应用于微光学、微机械、微流控和仿生表面等微纳结构和器件的制备。E-mail: dongwu@ustc.edu.cn

通讯作者: 刘炳瑞， brliu@ustc.edu.cn; 吴东， dongwu@ustc.edu.cn

中图分类号: TB383.1；TN249

收稿日期: 2022-05-05

修回日期: 2022-06-25

录用日期: 2022-07-07

网络出版日期: 2023-03-16

刊出日期: 2023-03-25

Femtosecond laser micromachining optical devices

Dong Bin^1,,
Zhang Juan²,
Wang Dawei¹,
Zhang Yiyuan¹,
Zhang Leran¹,
Li Rui¹,
Xin Chen¹,
Liu Shunli¹,
Zhang Zihang¹,
Wu Hao¹,
Jiang Shaojun¹,
Zhu Suwan¹,
Liu Bingrui^{1, ,},
Wu Dong^{1, ,}

- 1.
  CAS Key Laboratory of Mechanical Behavior and Design of Materials, Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China
- 2.
  Department of Clinical Laboratory, the First Affiliated Hospital of USTC, Division of Life Sciences and Medicine, University of Science and Technology of China, Hefei, Anhui 230001, China
Fund Project: National Natural Science Foundation of China (61927814, 52122511, 91963127, 52075516, U20A20290, 52175396) and Major Scientific and Technological Projects in Anhui Province (201903a05020005)

More Information

Corresponding authors: brliu@ustc.edu.cn; dongwu@ustc.edu.cn

Received Date 05 May 2022

Revised Date 25 June 2022

Accepted Date 07 July 2022

Available Online 16 March 2023

Published Date 25 March 2023

摘要

摘要:
光学器件正在向着小型化、集成化以及柔性可变形等方向发展，基于集成微纳光学器件的光学系统以其较低的功耗、快速的响应时间以及高信息容量等优势脱颖而出。然而目前的高精度微纳加工手段如聚焦离子束(focused ion beam，FIB)刻蚀、半导体光刻等工艺复杂，且缺乏灵活性。飞秒激光作为一种非接触、高精度、高脉冲强度的“冷”加工工具在微纳加工方面受到格外青睐。本文首先阐述了飞秒激光加工微纳光学器件的背景及相关机理，然后讨论了提高飞秒激光加工分辨率的各种方法，接着综述了基于飞秒激光的多种先进加工手段，其后总结了近年来飞秒激光加工微透镜、光栅、光波导以及光子晶体方面的代表性研究进展。最后，本文概括了飞秒激光加工微纳光学器件研究领域所面临的挑战以及未来发展方向。
- 飞秒激光 /
- 高精度 /
- 微纳结构 /
- 光学器件
Abstract:
Miniaturization, integration, and flexible deformation are the future development trends of optical devices. Meanwhile, optical systems based on integrated micro-optical devices stand out for their low power consumption, fast response, and high information storage capacity. However, current high-precision micro/nano processing methods, such as FIB (Focused Ion Beam) and semiconductor lithography, are far too complex and in lack of flexibility. Femtosecond laser, as a non-contact, high-precision, high-intensity tool for "cold" processing, is particularly favored in micro/nano processing. This review first elucidated the background and mechanism of femtosecond laser micromachining used in optical device. After that, we discussed a number of methods employed to improve the resolution of femtosecond micromachining. Then we listed various advanced processing means based on femtosecond laser and systematically summarized recent representative research developments of femtosecond laser micromachining used in microlens, gratings, optical waveguides, and photonic crystals. Finally, we concluded the challenges and the directions for further development of femtosecond laser machining in the field of micro-optical devices.
- femtosecond laser /
- high-precision /
- micro/nano structure /
- optical device

Overview

Overview: Currently, the development of semiconductor technology based on electrons has reached its physical limit, and the further reduced size of semiconductor devices will bring about the problems such as excessive power consumption. To solve the above-mentioned problems, information technology based on photons stands out for its fast response time, high storage capacity, strong parallel processing capability, and low power consumption. However, traditional optical devices are generally large in size, so the optical system composed of such devices is quite bulky and in lack of flexibility, which greatly increases the difficulty of optical system integration. The development of micro-optics theory makes the integration of optical devices possible. Optical devices on multiple scales have shown the performance no less than that of traditional optical devices, which not only substantially promotes the miniaturization of optical system but also puts forward higher requirements for the micromachining precision.

Laser, as a non-contact, high-energy, non-polluting, and automatic processing tool, holds various applications in material processing, wide-bandwidth communication, optical devices, data storage and other important industrial fields, and has been widely concerned by industry insider. Compared with traditional long-pulse or continuous laser processing technology, femtosecond laser exhibits various advantages such as ultrashort pulse width, ultrahigh peak power, and ultralow thermal effect, thus making itself a more advanced micro/nano processing tool.

Because of the threshold effect of two-photon polymerization (TPP) and the Gaussian distribution of femtosecond laser after being focused by the objective lens, TPP can theoretically achieve three-dimensional resolution beyond the diffraction limit if the light intensity at the center of the focus is just slightly greater than that of the two-photon ionization threshold. Based on the above-mentioned theory, femtosecond laser can actually fabricate arbitrary micro/nano 3D structures in the circumstances of point-by-point scanning. Other than TPP, the interaction between electrons and ion subsystems during the ultrashort-pulse laser processing of metal or semiconductor is mostly analyzed by the Double-Temperature Equation (DTE). Based on the DTE, femtosecond laser has been employed to drill holes or achieve arbitrary patterning on metal surface. When ultrashort-pulse laser interacts with dielectric materials, precise reduction of material can be achieved through "avalanche ionization" triggered by multi-photon ionization or tunneling ionization. Based on the above-mentioned theory, femtosecond laser can actually process any material in practice.

Therefore, in this review, the principle and advantages of femtosecond laser as well as its application in the micro/nano processing of optical device are discussed in detail. This review is divided into five sections. The first section introduces the mechanism and processing properties of femtosecond laser. The second section discusses a variety of methods to improve the resolution of femtosecond laser micromachining. The third section focuses on the femtosecond laser processing technology, and the fourth section describes the femtosecond laser's application in the processing of optical devices, including microlens, optical waveguide, grating, and photonic crystals. Finally, this review makes a summary and discusses the prospect of femtosecond laser micromachining used in optical devices.

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图 1 超分辨的加工原理示意图及加工效果^{[ 4]}

Figure 1. Schematic diagram of the super-resolution processing principle and characteristics after processing^{[ 4]}. Figure reproduced with permission from ref. [ 4] © Springer Nature

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图 2 飞秒激光直写加工^{[ 45]}

Figure 2. Femtosecond laser direct writing^{[ 45]}. Figure reproduced with permission from ref. [ 45] © De Gruyter

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图 3 基于DOE的飞秒激光加工示意图及加工效果^{[ 49]}

Figure 3. Schematic diagram of the femtosecond laser fabrication based on diffractive optical elements and characteristics after processing^{[ 49]}. Figure reproduced with permission from ref. [ 49] © Springer Nature

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图 4 结合飞秒激光双光子聚合和时空聚焦的数字微镜投影加工系统示意图及加工效果^{[ 57]}

Figure 4. The schematic diagram of the digital micromirror projection system based on femtosecond laser two-photon polymerization and spatio-temporal focusing and characteristics after processing^{[ 57]}. Figure reproduced with permission from ref. [ 57] © The American Association for the Advancement of Science(AAAS)

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图 5 利用SLM实现并行加工。(a) 利用SLM生成飞秒环形涡旋光束，用于螺旋扫描加工^{[ 65]}；(b) 利用SLM生成飞秒Mathieu光束^{[ 66]}；(c) 利用SLM生成C形贝塞尔光束，用于加工微型管道^{[ 68]}

Figure 5. Parallel processing based on spatial light modulator. (a) Helical scanning of femtosecond ring-shaped vortex beam based on spatial light modulator^{[ 65]}; (b) Generation of Mathieu beam based on spatial light modulator^{[ 66]}; (c) Fabrication of microtubes using C-shaped Bessel beam generated by spatial light modulator^{[ 68]}. Figure reproduced with permission from: (a) ref. [ 65] © Wiley; (b) ref. [ 66] and (c) ref. [ 68] © American Chemical Society.

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图 6 利用SLM进行焦场调制^{[ 72]}

Figure 6. Focal field engineering based on spatial light modulator^{[ 72]}. Figure reproduced with permission from ref. [ 72] © John Wiley and Sons

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图 7 飞秒激光干涉加工示意图及加工效果^{[ 79]}

Figure 7. Schematic diagram of the femtosecond (fs) laser interference processing and characteristics after processing^{[ 79]}. Figure reproduced with permission from ref. [ 79] © MDPI

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图 8 微透镜加工的不同工艺。(a) 转印^{[ 83]}；(b) 湿法刻蚀^{[ 84]}；(c) 干法刻蚀^{[ 86]}

Figure 8. Processing of microlenses. (a) Transferring^{[ 83]}; (b) Wet etching^{[ 84]}; (c) Dry etching^{[ 86]}. Figure reproduced with permission from: (a) ref. [ 83], (b) ref. [ 84] and (c) ref. [ 86] © Wiley

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图 9 飞秒激光双光子聚合加工微透镜。(a) 酸碱响应的蛋白基微透镜^{[ 93]}；(b) 酸碱响应的双材料复眼结构^{[ 25]}

Figure 9. Micromachining of microlenses based on two-photon polymerization of femtosecond laser. (a) Protein-based microlens in response to the change of pH^{[ 93]}; (b) Double-material compound eye in response to the change of pH^{[ 25]}. Figure reproduced with permission from: (a) ref. [ 93] and (b) ref. [ 25] © Wiley

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图 10 新型微透镜。(a) 激光诱导热变形加工复杂微透镜阵列^{[ 95]}；(b) 飞秒激光结合液滴的表面张力直接打印聚合物微透镜^{[ 96]}；(c) 利用飞秒激光在CMOS图像传感器表面集成复合微透镜^{[ 82]}

Figure 10. Innovative microlenses. (a) Complex microlens arrays based on laser-induced thermal deformation^{[ 95]}; (b) Direct patterning of polymeric microlenses based on the combination of femtosecond laser and surface tension of droplet^{[ 96]}; (c) Integration of compound lens on the surface of CMOS image sensor based on femtosecond laser^{[ 82]}. Figure reproduced with permission from: (a) ref.[ 95] © Springer Nature; (b) ref. [ 96] © American Chemical Society; (c) ref. [ 82] © The American Association for the Advancement of Science (AAAS)

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图 11 飞秒激光直写加工光波导。(a) 单线波导^{[ 100]}；(b) 双线波导^{[ 106]}；(c) 包层波导^{[ 111]}

Figure 11. Femtosecond laser direct writing optical waveguide. (a) Single-line waveguide^{[ 100]}; (b) Double-line waveguide^{[ 106]}; (c) Depressed cladding waveguide^{[ 111]}. Figure reproduced with permission from: (a) ref. [ 100] and (c) ref. [ 111] © Wiley; (b) ref. [ 106] © MDPI.

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图 12 飞秒激光微纳光栅加工。(a) 飞秒激光加工FBG工艺流程^{[ 117]}；(b) 飞秒激光利用柱透镜在硅基底上加工LIPSS^{[ 129]}；(c) 飞秒激光双光子聚合加工连续相位涡旋光栅^{[ 22]}

Figure 12. Fabrication of micro-gratings based on femtosecond laser. (a) Procedures of femtosecond laser fabricating FBG^{[ 117]}; (b) Fabrication of LIPSS on Si substrate utilizing cylindrical lens based on femt osecond laser^{[ 129]}; (c) Fabrication of continuous phase vortex grating based on two-photon polymerization of femtosecond laser^{[ 22]}. Figure reproduced with permission from: (a) ref. [ 117] © American Chemical Society; (b) ref. [ 129] © Wiley; (c) ref. [ 22] © AIP Publishing

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图 13 飞秒激光加工可见光波段的“木堆”结构光子晶体^{[ 146]}

Figure 13. Fabrication of woodpile photonic crystal whose stop band lies in the visible spectrum based on femtosecond laser^{[ 146]}. Figure reproduced with permission from ref. [ 146] © Springer Nature

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图 14 飞秒激光加工非线性光子晶体。(a) 在LiNbO₃中加工非线性光子晶体^{[ 150]}；(b) 在BCT中加工非线性光子晶体^{[ 151]}

Figure 14. Fabrication of nonlinear photonic crystal based on femtosecond laser. (a) Fabrication of nonlinear photonic crystal in LiNbO₃^{[ 150]}; (b) Fabrication of nonlinear photonic crystal in BCT^{[ 151]}. Figure reproduced with permission from: (a) ref. [ 150] and (b) ref. [ 151] © Springer Nature

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飞秒激光加工微纳光学器件

通讯作者: 刘炳瑞， brliu@ustc.edu.cn; 吴东， dongwu@ustc.edu.cn

Femtosecond laser micromachining optical devices

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Femtosecond laser micromachining optical devices

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